Evaluation of HfAlO high-k materials for control dielectric applications in non-volatile memories

0167-9317/$ see front matter 2008 Elsevier B.V. A doi:10.1016/j.mee.2008.09.008 * Corresponding author. E-mail address: [email protected] (G. Molas). In this paper, we evaluate the potentiality of hafnium aluminium oxide (HfAlO) high-k materials for control dielectric application in non-volatile memories. We analyze the electrical properties (conduction and parasitic trapping) of HfAlO single layers and SiO2/HfAlO/SiO2 triple layer stacks as a function of the HfAlO thickness and Hf:Al ratio. A particular attention is given to the electrical behaviour of the samples at high temperature, up to 250 C. Experimental results obtained on silicon nanocrystal memories demonstrate the high advantage of HfAlO based control dielectrics on the memory performances for Fowler– Nordheim operation. Then an analytical model is presented, to simulate the program erase characteristics in the transient regime and at saturation, depending on the high-k control dielectric properties. A very good agreement is obtained between the experimental data and the simulation results. 2008 Elsevier B.V. All rights reserved.